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PRODUCT DETAILS
Overhead Hoist Transport (OHT)
Streamline material handling with Overhead Hoist Transport (OHT), offering efficient, automated solutions for seamless
movement of goods in high-tech manufacturing environments like semiconductors and electronics.
Overhead Hoist Transport (OHT)
The Overhead Hoist Transport (OHT) system is a cutting-edge solution designed for material handling within semiconductor FABs. It facilitates the seamless transportation of materials between different process areas (inter-bay) as well as within specific zones, including manufacturing equipment, testing equipment, and the Stocker (intra-bay). Renowned for its advanced automation capabilities, exceptional efficiency, and ability to maintain a clean, low-vibration environment, the OHT system plays a crucial role in optimizing the productivity and reliability of high-tech manufacturing processes.
OHT Models
.png?width=167&height=188&name=image%202%20(2).png "OHT AF1100")
AF1100
Carrying magazine: 12” FOUP, 6”/8” SMIF Pod
Application scenarios: The workshop in the front-end process and the Bumping and TSV workshops in the back-end process
AM690
Carrying magazine: Magazine
Application scenarios: Die or Wire Bonding workshop in the back-end process. The workshop is 2.7m high, ensuring a clearance of >2.0 m under the OHT.
.png?width=178&height=119&name=image%204%20(1).png "OHT AF1100")
AF1100
Carrying magazine: 12” FOUP, 6”/8” SMIF Pod
Application scenarios: Die or Wire Bonding workshop in the back-end process. The workshop is 2.5m high, ensuring a clearance of >2.0 m under the OHT.
OHT Specs
| OHT Model | AF1100 | AM690 | AM490 | |
| Carrying cassette type | 12”FOUP 6"/8" SMIF Pod |
Magazine | Magazine | |
| Number of clamping | 1 | 1~2 | 1~2 | |
| Payload (kg) | 15 | 15 | 15 | |
| Size W*D*H (mm) | 850*450*960 | 865*570*585 | 1050*650*440 | |
| Weight (kg) | 110 | 100 | 100 | |
| Bottom/ceiling distance (mm) | 1100 | 690 | 490 | |
| Travel | Straight speed (m/s) | 3.5 (without FOUP) 3.3 (with FOUP) |
3.5 (without MGZ) 3.3 (with MGZ) |
2.3 (without MGZ) 2.1 (with MGZ) |
| Curve speed (m/s) | 1 | 1 | 1 | |
| Acceleration and deceleration (m/s2) | Acceleration 2.0 Deceleration 3.0 |
Acceleration 2.0 Deceleration 3.0 |
Acceleration 1.2 Deceleration 1.8 |
|
| Positioning accuracy (mm) | ±1 | |||
| Hoist | Speed (m/s) | 1.9 (empty) 1.5 (with load) |
1.9 (empty) 1.5 (with load) |
1.9 (empty) 1.5 (with load) |
| Acceleration & deceleration (m/s²) | 3.0 (empty) 2.5 (with load) |
3.0 (empty) 2.5 (with load) |
3.0 (empty) 2.5 (with load) |
|
| Side fork | Speed (m/s) | 0.36 | 0.36 | 0.36 |
| Acceleration & deceleration (m/s2) | 1.0 | 1.0 | 1.0 | |
| Stroke (mm) | 420/470 (dual sides) | 300 (single side) | 350 (single side) | |
| Rotation | Angle | 180° | 180° | Non |
| Speed (deg/s) | 26 | 26 | - | |
| Vibration | <0.5 G | |||
| Cleanliness | Class 100 | |||
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