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High requirements for cleanliness
The traditional logistics handling device occupies a large volume, reduces the utilization rate of clean workshop space, and is difficult to meet the cleanliness requirements.
High requirements for handling stability
The wafer manufacturing process is complex, involving multiple production steps, and the size and weight of wafer is constantly increasing, so uncontrollable factors in the transportation process can lead to quality problems.
High requirements for handling efficiency
The distance between cleaning workshops in different processes is far, and the efficiency of manual handling is limited by the weight and fragility of wafers.
Our Solution
Our AMHS helps solve the bottleneck of semiconductor factories.
● Core AMHS equipment such as wireless power supply systems (HID), is cleaner, safer and maintenance-free to meet the cleanliness requirements of semiconductor factories.
● Under the control of Manufacturing Execution System (MES) and Material Control System (MCS), AMHS helps semiconductor factories achieve truly intelligent handling, which is more stable than manual handling.
● Through communication with Manufacturing Execution System (MES) , AMHS uses the dispatch system to assign the OHT to grab and handle the loading box of the specified target machine, and the handling speed can be as high as (3~4 m/s). It can achieve greater handling capacity, reduce the waiting time of wafers in process, and shorten the wafer production cycle.
Customer Value
AMHS improves manufacturing efficiency, improves product yield, reduces labor costs, enhances production flexibility, and improves safety in semiconductor factories. It can increase the overall efficiency of the workshop by 5%, increase the product yield by 1%, reduce the fragment rate generated by personnel by 99%.
